Boshen Liang, Louis Paquet, Yongbin Jeong, Paul Heremans, David Cheyns. Design and Fabrication of Integrated Piezoelectric Micropump with Vortex Enhancement Optimization. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1423-1426, IEEE, 2021. [doi]
Abstract is missing.