Thermal Studies of BEOL-compatible Top-Gated Atomically Thin ALD In2O3 FETs - researchr publication authors

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Pai-Ying Liao, Sami Alajlouni, Mengwei Si, Zhuocheng Zhang, Zehao Lin, Jinhyun Noh, Calista Wilk, Ali Shakouri, Peide D. Ye. Thermal Studies of BEOL-compatible Top-Gated Atomically Thin ALD In2O3 FETs. In IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits 2022), Honolulu, HI, USA, June 12-17, 2022. pages 322-323, IEEE, 2022. [doi]

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