Hsin-Hung Liao, Hsin-Hong Shen, Bo-Ting Liao, Yao-Joe Yang, Yu-Chun Chen, Woei-Wu Pai. A MEMS electrostatic resonator for a fast-scan STM system. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 549-552, IEEE, 2010. [doi]
Abstract is missing.