Liang Liao, Fengfeng Xi. A linearized model for control of automated polishing process. In Proceedings of 2005 IEEE Conference on Control Applications, CCA 2005, Toronto, ON, Canada, August 29-31, 2005. pages 986-991, IEEE, 2005. [doi]
@inproceedings{LiaoX05-0,
  title = {A linearized model for control of automated polishing process},
  author = {Liang Liao and Fengfeng Xi},
  year = {2005},
  doi = {10.1109/CCA.2005.1507258},
  url = {https://doi.org/10.1109/CCA.2005.1507258},
  researchr = {https://researchr.org/publication/LiaoX05-0},
  cites = {0},
  citedby = {0},
  pages = {986-991},
  booktitle = {Proceedings of 2005 IEEE Conference on Control Applications, CCA 2005, Toronto, ON, Canada, August 29-31, 2005},
  publisher = {IEEE},
  isbn = {0-7803-9354-6},
}