Challenges in the application of hybrid reluctance actuators in scanning positioning stages in vacuum with nanometer accuracy and mGauss magnetic stray field

Anne van Lievenoogen, Adrian Toma, Upendra Ummethala. Challenges in the application of hybrid reluctance actuators in scanning positioning stages in vacuum with nanometer accuracy and mGauss magnetic stray field. In American Control Conference, ACC 2013, Washington, DC, USA, June 17-19, 2013. pages 5286-5289, IEEE, 2013. [doi]

Abstract

Abstract is missing.