Michael Lifshits, Roman Goldenberg, Ehud Rivlin, Michael Rudzsky. Using Pattern Recognition for Self-Localization in Semiconductor Manufacturing Systems. In Carl Edward Rasmussen, Heinrich H. Bülthoff, Bernhard Schölkopf, Martin A. Giese, editors, Pattern Recognition, 26th DAGM Symposium, August 30 - September 1, 2004, Tübingen, Germany, Proceedings. Volume 3175 of Lecture Notes in Computer Science, pages 520-527, Springer, 2004. [doi]
Abstract is missing.