Machine Learning (ML)-Based Model to Characterize the Line Edge Roughness (LER)-Induced Random Variation in FinFET

Jaehyuk Lim, Changhwan Shin. Machine Learning (ML)-Based Model to Characterize the Line Edge Roughness (LER)-Induced Random Variation in FinFET. IEEE Access, 8:158237-158242, 2020. [doi]

Abstract

Abstract is missing.