A New Class of Sequences Without Interferences for Cluster Tools With Tight Wafer Delay Constraints

Yuchul Lim, Tae-Sun Yu, Tae-Eog Lee. A New Class of Sequences Without Interferences for Cluster Tools With Tight Wafer Delay Constraints. IEEE T. Automation Science and Engineering, 16(1):392-405, 2019. [doi]

Authors

Yuchul Lim

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Tae-Sun Yu

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Tae-Eog Lee

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