Yuchul Lim, Tae-Sun Yu, Tae-Eog Lee. A New Class of Sequences Without Interferences for Cluster Tools With Tight Wafer Delay Constraints. IEEE T. Automation Science and Engineering, 16(1):392-405, 2019. [doi]
@article{LimYL19,
title = {A New Class of Sequences Without Interferences for Cluster Tools With Tight Wafer Delay Constraints},
author = {Yuchul Lim and Tae-Sun Yu and Tae-Eog Lee},
year = {2019},
doi = {10.1109/TASE.2018.2815157},
url = {https://doi.org/10.1109/TASE.2018.2815157},
researchr = {https://researchr.org/publication/LimYL19},
cites = {0},
citedby = {0},
journal = {IEEE T. Automation Science and Engineering},
volume = {16},
number = {1},
pages = {392-405},
}