Wafer Pattern Counting, Detection and Classification Based on Encoder-Decoder CNN Structure

Yu Lin. Wafer Pattern Counting, Detection and Classification Based on Encoder-Decoder CNN Structure. In 2022 IEEE International Conference on Electro Information Technology, EIT 2022, Mankato, MN, USA, May 19-21, 2022. pages 109-113, IEEE, 2022. [doi]

Abstract

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