Chih-Hung Lin, Shoou-Jinn Chang, Ting Jen Hsueh. WO3 nanoparticle with MEMS technology improve the sensing response by HWCVD system. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 190-193, IEEE, 2017. [doi]
@inproceedings{LinCH17,
title = {WO3 nanoparticle with MEMS technology improve the sensing response by HWCVD system},
author = {Chih-Hung Lin and Shoou-Jinn Chang and Ting Jen Hsueh},
year = {2017},
doi = {10.1109/NEMS.2017.8017003},
url = {https://doi.org/10.1109/NEMS.2017.8017003},
researchr = {https://researchr.org/publication/LinCH17},
cites = {0},
citedby = {0},
pages = {190-193},
booktitle = {12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017},
publisher = {IEEE},
isbn = {978-1-5090-3059-0},
}