WO3 nanoparticle with MEMS technology improve the sensing response by HWCVD system

Chih-Hung Lin, Shoou-Jinn Chang, Ting Jen Hsueh. WO3 nanoparticle with MEMS technology improve the sensing response by HWCVD system. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 190-193, IEEE, 2017. [doi]

Abstract

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