MEMS-based humidity sensor based on thiol-coated gold nanoparticles

Che-Hsin Lin, Lung-Ming Fu, Chia-Yen Lee. MEMS-based humidity sensor based on thiol-coated gold nanoparticles. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 191-194, IEEE, 2014. [doi]

Abstract

Abstract is missing.