Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology

Chen-Yang Lin, Cheng-Chih Hsu, Ching-Liang Dai. Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology. Micromachines, 6(11):1645-1654, 2015. [doi]

Authors

Chen-Yang Lin

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Cheng-Chih Hsu

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Ching-Liang Dai

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