Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology

Chen-Yang Lin, Cheng-Chih Hsu, Ching-Liang Dai. Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology. Micromachines, 6(11):1645-1654, 2015. [doi]

Abstract

Abstract is missing.