A Uniform Pressure Apparatus for Micro/Nanoimprint Lithography Equipment

Jian-Shian Lin, Chieh-Lung Lai, Ya-Chun Tu, Cheng-Hua Wu, Yoshimi Takeuchi. A Uniform Pressure Apparatus for Micro/Nanoimprint Lithography Equipment. IJAT, 3(1):84-88, 2009. [doi]

Abstract

Abstract is missing.