Yung-Chian Lin, Ya-Chu Lee, Chia-Hung Yang, Weileun Fang. Vertical Integration of Pressure/Humidity/Temperature Sensors for CMOS-MEMS Environmental Sensing Hub. In 2021 IEEE Sensors, Sydney, Australia, October 31 - Nov. 3, 2021. pages 1-4, IEEE, 2021. [doi]
Abstract is missing.