Yiyu Lin, Wei Ma, Siqi Liu, Xudong Zheng, Zhonghe Jin. A robust triangular-electrode based capacitive detection method for MEMS gyroscopes. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 226-230, IEEE, 2017. [doi]
Abstract is missing.