A 4 kHz, 25 μg/√Hz, 3-Axis MEMS Accelerometer ASIC Using Beyond-Resonant-Frequency Sensing

James Lin, Long Pham, Ran Tao, A. Gutmann, Shanglin Guo, Adam Cywar, Adam Spirer, Johan Mansson, Khiem Nguyen. A 4 kHz, 25 μg/√Hz, 3-Axis MEMS Accelerometer ASIC Using Beyond-Resonant-Frequency Sensing. In IEEE Custom Integrated Circuits Conference, CICC 2023, San Antonio, TX, USA, April 23-26, 2023. pages 1-2, IEEE, 2023. [doi]

Authors

James Lin

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Long Pham

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Ran Tao

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A. Gutmann

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Shanglin Guo

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Adam Cywar

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Adam Spirer

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Johan Mansson

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Khiem Nguyen

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