James Lin, Long Pham, Ran Tao, A. Gutmann, Shanglin Guo, Adam Cywar, Adam Spirer, Johan Mansson, Khiem Nguyen. A 4 kHz, 25 μg/√Hz, 3-Axis MEMS Accelerometer ASIC Using Beyond-Resonant-Frequency Sensing. In IEEE Custom Integrated Circuits Conference, CICC 2023, San Antonio, TX, USA, April 23-26, 2023. pages 1-2, IEEE, 2023. [doi]
Abstract is missing.