Design of a three-axis high-g piezoresistive accelerometer

Liwei Lin, Feng Pan, Jiashan Xu, Hang Guo. Design of a three-axis high-g piezoresistive accelerometer. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 773-776, IEEE, 2010. [doi]

Abstract

Abstract is missing.