Film Thickness Prediction Based on Digital Twin and Neural Network

Zeqin Lin, Haiye Quan, Junjun Wu, Weilin Chen, Xiaoting Hu, Dachuang Li, Yating Cheng. Film Thickness Prediction Based on Digital Twin and Neural Network. In IEEE International Conference on Robotics and Biomimetics, ROBIO 2025, Chengdu, China, December 3-7, 2025. pages 645-650, IEEE, 2025. [doi]

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