Hung-Chun Lin, Chao-Ton Su, Chi-Ching Wang, Bing-Hung Chang, Rei-Cheng Juang. Parameter optimization of continuous sputtering process based on Taguchi methods, neural networks, desirability function, and genetic algorithms. Expert Syst. Appl., 39(17):12918-12925, 2012. [doi]
Abstract is missing.