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Performance Enhancement of Piezoelectric MEMS Microspeaker by Jointed and Separated Curved Cantilever Array with Phase Modulation Circuit

Chia-Hao Lin, Chin Tseng, Tsung-Wen Tsai, Po-Shen Chen, Mei-Feng Lai, Weileun Fang. Performance Enhancement of Piezoelectric MEMS Microspeaker by Jointed and Separated Curved Cantilever Array with Phase Modulation Circuit. In 2024 IEEE SENSORS, Kobe, Japan, October 20-23, 2024. pages 1-4, IEEE, 2024. [doi]

Authors

Chia-Hao Lin

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Chin Tseng

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Tsung-Wen Tsai

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Po-Shen Chen

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Mei-Feng Lai

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Weileun Fang

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