Chia-Hao Lin, Chin Tseng, Tsung-Wen Tsai, Po-Shen Chen, Mei-Feng Lai, Weileun Fang. Performance Enhancement of Piezoelectric MEMS Microspeaker by Jointed and Separated Curved Cantilever Array with Phase Modulation Circuit. In 2024 IEEE SENSORS, Kobe, Japan, October 20-23, 2024. pages 1-4, IEEE, 2024. [doi]
Abstract is missing.