Machine Learning-Based Wheel Monitoring for Sapphire Wafers

Yu-Kun Lin, Bing-Fei Wu. Machine Learning-Based Wheel Monitoring for Sapphire Wafers. IEEE Access, 9:46348-46363, 2021. [doi]

Authors

Yu-Kun Lin

This author has not been identified. Look up 'Yu-Kun Lin' in Google

Bing-Fei Wu

This author has not been identified. Look up 'Bing-Fei Wu' in Google