Yu-Kun Lin, Bing-Fei Wu. Machine Learning-Based Wheel Monitoring for Sapphire Wafers. IEEE Access, 9:46348-46363, 2021. [doi]
@article{LinW21-0,
title = {Machine Learning-Based Wheel Monitoring for Sapphire Wafers},
author = {Yu-Kun Lin and Bing-Fei Wu},
year = {2021},
doi = {10.1109/ACCESS.2021.3067329},
url = {https://doi.org/10.1109/ACCESS.2021.3067329},
researchr = {https://researchr.org/publication/LinW21-0},
cites = {0},
citedby = {0},
journal = {IEEE Access},
volume = {9},
pages = {46348-46363},
}