Hybrid Si Etching for Performance Enhancement of the Atmospheric CMOS MEMS Infrared Sensor

Pen-Sheng Lin, Yijia Wang, Ming-Ching Cheng, Yu-Chen Chen, Yu-Cheng Huang, Weileun Fang. Hybrid Si Etching for Performance Enhancement of the Atmospheric CMOS MEMS Infrared Sensor. In 2020 IEEE Sensors, Rotterdam, The Netherlands, October 25-28, 2020. pages 1-4, IEEE, 2020. [doi]

Abstract

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