Preparation, Characterization, Insulation Study of Al2O3 Thin Film Deposited by Dual Ion Beam Sputtering - researchr publication authors

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Xingkai Lin, Yanlei Wang, Guifu Ding, Congchun Zhang. Preparation, Characterization, Insulation Study of Al2O3 Thin Film Deposited by Dual Ion Beam Sputtering. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 115-118, IEEE, 2018. [doi]

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