Xingkai Lin, Yanlei Wang, Guifu Ding, Congchun Zhang. Preparation, Characterization, Insulation Study of Al2O3 Thin Film Deposited by Dual Ion Beam Sputtering. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 115-118, IEEE, 2018. [doi]
@inproceedings{LinWDZ18,
title = {Preparation, Characterization, Insulation Study of Al2O3 Thin Film Deposited by Dual Ion Beam Sputtering},
author = {Xingkai Lin and Yanlei Wang and Guifu Ding and Congchun Zhang},
year = {2018},
doi = {10.1109/NEMS.2018.8556912},
url = {https://doi.org/10.1109/NEMS.2018.8556912},
researchr = {https://researchr.org/publication/LinWDZ18},
cites = {0},
citedby = {0},
pages = {115-118},
booktitle = {13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018},
publisher = {IEEE},
isbn = {978-1-5386-5273-2},
}