Data Efficient Lithography Modeling with Residual Neural Networks and Transfer Learning

Yibo Lin, Yuki Watanabe, Taiki Kimura, Tetsuaki Matsunawa, Shigeki Nojima, Meng Li 0004, David Z. Pan. Data Efficient Lithography Modeling with Residual Neural Networks and Transfer Learning. In Chris Chu, Ismail Bustany, editors, Proceedings of the 2018 International Symposium on Physical Design, ISPD 2018, Monterey, CA, USA, March 25-28, 2018. pages 82-89, ACM, 2018. [doi]

Authors

Yibo Lin

This author has not been identified. Look up 'Yibo Lin' in Google

Yuki Watanabe

This author has not been identified. Look up 'Yuki Watanabe' in Google

Taiki Kimura

This author has not been identified. Look up 'Taiki Kimura' in Google

Tetsuaki Matsunawa

This author has not been identified. Look up 'Tetsuaki Matsunawa' in Google

Shigeki Nojima

This author has not been identified. Look up 'Shigeki Nojima' in Google

Meng Li 0004

This author has not been identified. Look up 'Meng Li 0004' in Google

David Z. Pan

This author has not been identified. Look up 'David Z. Pan' in Google