A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites - researchr publication

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Bin Lin, Xiaolang Yan, Zheng Shi, Yi-Wei Yang. A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites. Journal of Zhejiang University - Science C, 12(5):436-442, 2011. [doi]

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