Erratum to: A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites

Bin Lin, Xiaolang Yan, Zheng Shi, Yi-Wei Yang. Erratum to: A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites. Journal of Zhejiang University - Science C, 12(7):614, 2011. [doi]

Abstract

Abstract is missing.