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Study of glass frit induced stiction using a micromirror array

F. Z. Ling, Jeroen De Coster, Ann Witvrouw, J.-P. Celis, Ingrid De Wolf. Study of glass frit induced stiction using a micromirror array. Microelectronics Reliability, 52(9-10):2256-2260, 2012. [doi]

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F. Z. Ling

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Jeroen De Coster

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Ann Witvrouw

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J.-P. Celis

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Ingrid De Wolf

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