Study of glass frit induced stiction using a micromirror array

F. Z. Ling, Jeroen De Coster, Ann Witvrouw, J.-P. Celis, Ingrid De Wolf. Study of glass frit induced stiction using a micromirror array. Microelectronics Reliability, 52(9-10):2256-2260, 2012. [doi]

@article{LingCWCW12,
  title = {Study of glass frit induced stiction using a micromirror array},
  author = {F. Z. Ling and Jeroen De Coster and Ann Witvrouw and J.-P. Celis and Ingrid De Wolf},
  year = {2012},
  doi = {10.1016/j.microrel.2012.06.009},
  url = {http://dx.doi.org/10.1016/j.microrel.2012.06.009},
  researchr = {https://researchr.org/publication/LingCWCW12},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {52},
  number = {9-10},
  pages = {2256-2260},
}