Multiplexed MPC for Multizone Thermal Processing in Semiconductor Manufacturing

Keck Voon Ling, Weng Khuen Ho, Bing-Fang Wu, A. Lo, Han Yan. Multiplexed MPC for Multizone Thermal Processing in Semiconductor Manufacturing. IEEE Trans. Contr. Sys. Techn., 18(6):1371-1380, 2010. [doi]

Abstract

Abstract is missing.