Keck Voon Ling, Han Yan, Weng Khuen Ho, Khiang Wee Lim. Multi-Zone Thermal Processing in Semiconductor Manufacturing: Bias Estimation. IEEE Trans. Industrial Informatics, 5(2):216-228, 2010. [doi]
@article{LingYHL10,
title = {Multi-Zone Thermal Processing in Semiconductor Manufacturing: Bias Estimation},
author = {Keck Voon Ling and Han Yan and Weng Khuen Ho and Khiang Wee Lim},
year = {2010},
doi = {10.1109/TII.2010.2040285},
url = {http://dx.doi.org/10.1109/TII.2010.2040285},
researchr = {https://researchr.org/publication/LingYHL10},
cites = {0},
citedby = {0},
journal = {IEEE Trans. Industrial Informatics},
volume = {5},
number = {2},
pages = {216-228},
}