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Keck Voon Ling, Han Yan, Weng Khuen Ho, Khiang Wee Lim. Multi-Zone Thermal Processing in Semiconductor Manufacturing: Bias Estimation. IEEE Trans. Industrial Informatics, 5(2):216-228, 2010. [doi]
Possibly Related PublicationsThe following publications are possibly variants of this publication: Multiplexed MPC for Multizone Thermal Processing in Semiconductor ManufacturingKeck Voon Ling, Weng Khuen Ho, Bing-Fang Wu, A. Lo, Han Yan. tcst, 18(6):1371-1380, 2010. [doi]
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