An Overview of Piezoelectric Self-Sensing Actuation for Nanopositioning Applications: Electrical Circuits, Displacement, and Force Estimation

Joel Bafumba Liseli, Joël Agnus, Philippe Lutz, Micky Rakotondrabe. An Overview of Piezoelectric Self-Sensing Actuation for Nanopositioning Applications: Electrical Circuits, Displacement, and Force Estimation. IEEE T. Instrumentation and Measurement, 69(1):2-14, 2020. [doi]

Abstract

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