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Ultra-Precision Measurement and Control of Angle Motion in Piezo-Based Platforms Using Strain Gauge Sensors and a Robust Composite Controller

Lei Liu, Yu-Guang Bai, Da-Li Zhang, Zhi-Gang Wu. Ultra-Precision Measurement and Control of Angle Motion in Piezo-Based Platforms Using Strain Gauge Sensors and a Robust Composite Controller. Sensors, 13(7):9070-9084, 2013. [doi]

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