Haotian Liu, Hao Chen, Yun Cao, Weirong Nie, Zhanwen Xi, Shenghong Lei. Stochastic analysis of the elctrothermal microactuator with fabrication error. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1287-1290, IEEE, 2021. [doi]
Abstract is missing.