Failure analysis of through-silicon vias in free-standing wafer under thermal-shock test

Xi Liu, Qiao Chen, Venkatesh Sundaram, Rao R. Tummala, Suresh K. Sitaraman. Failure analysis of through-silicon vias in free-standing wafer under thermal-shock test. Microelectronics Reliability, 53(1):70-78, 2013. [doi]

@article{LiuCSTS13,
  title = {Failure analysis of through-silicon vias in free-standing wafer under thermal-shock test},
  author = {Xi Liu and Qiao Chen and Venkatesh Sundaram and Rao R. Tummala and Suresh K. Sitaraman},
  year = {2013},
  doi = {10.1016/j.microrel.2012.06.140},
  url = {http://dx.doi.org/10.1016/j.microrel.2012.06.140},
  researchr = {https://researchr.org/publication/LiuCSTS13},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {53},
  number = {1},
  pages = {70-78},
}