Jun Liu, Kang Du, Ruirong Wang, Yunbo Shi. Research of meso-piezoresistive effect micromachined gyroscope. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 1-4, IEEE, 2011. [doi]
Abstract is missing.