Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope

Yuxian X. Liu, Weilei L. Feng, Chunhua H. He, Long Wang, Liguo G. Dong, Qiancheng C. Zhao, Zhenchuan C. Yang, Guizhen Z. Yan. Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 199-203, IEEE, 2014. [doi]

Abstract

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