Vertical-objective-based ellipsometric microscope for backside illuminated real-time visualization of nm-thick lubricant films

Qingqing Liu, Kenji Fukuzawa, Yosuke Kajihara, Hedong Zhang, Shintaro Itoh. Vertical-objective-based ellipsometric microscope for backside illuminated real-time visualization of nm-thick lubricant films. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2011, Nagoya, Japan, November 6-9, 2011. pages 51-54, IEEE, 2011. [doi]

Abstract

Abstract is missing.