Design of an on-Chip Joule-Thomson Micro Cryogenic Cooler Based on MEMS Compressor

Dachuan Liu, Xiaoyan Hu, Dongliang Zhang, Xiao Lin, Weiping Wang, Ziyu Ding, Qiunan Feng. Design of an on-Chip Joule-Thomson Micro Cryogenic Cooler Based on MEMS Compressor. In 13th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, April 22-26, 2018. pages 135-138, IEEE, 2018. [doi]

Abstract

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