A Bayesian Approach to Diameter Estimation in the Diameter Control System of Silicon Single Crystal Growth

Ding Liu, Junli Liang. A Bayesian Approach to Diameter Estimation in the Diameter Control System of Silicon Single Crystal Growth. IEEE T. Instrumentation and Measurement, 60(4):1307-1315, 2011. [doi]

Authors

Ding Liu

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Junli Liang

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