A Bayesian Approach to Diameter Estimation in the Diameter Control System of Silicon Single Crystal Growth

Ding Liu, Junli Liang. A Bayesian Approach to Diameter Estimation in the Diameter Control System of Silicon Single Crystal Growth. IEEE T. Instrumentation and Measurement, 60(4):1307-1315, 2011. [doi]

@article{LiuL11-4,
  title = {A Bayesian Approach to Diameter Estimation in the Diameter Control System of Silicon Single Crystal Growth},
  author = {Ding Liu and Junli Liang},
  year = {2011},
  doi = {10.1109/TIM.2010.2086610},
  url = {http://dx.doi.org/10.1109/TIM.2010.2086610},
  tags = {control systems, systematic-approach},
  researchr = {https://researchr.org/publication/LiuL11-4},
  cites = {0},
  citedby = {0},
  journal = {IEEE T. Instrumentation and Measurement},
  volume = {60},
  number = {4},
  pages = {1307-1315},
}