A new micropump using amplified deformation of resilient membranes

Chung-Hsien Liu, Gwo-Bin Lee. A new micropump using amplified deformation of resilient membranes. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 167-170, IEEE, 2013. [doi]

@inproceedings{LiuL13-59,
  title = {A new micropump using amplified deformation of resilient membranes},
  author = {Chung-Hsien Liu and Gwo-Bin Lee},
  year = {2013},
  doi = {10.1109/NEMS.2013.6559706},
  url = {http://dx.doi.org/10.1109/NEMS.2013.6559706},
  researchr = {https://researchr.org/publication/LiuL13-59},
  cites = {0},
  citedby = {0},
  pages = {167-170},
  booktitle = {8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013},
  publisher = {IEEE},
}