Predictive Modeling for Advanced Virtual Metrology: A Tree-Based Approach

Yang Liu, Xin Li. Predictive Modeling for Advanced Virtual Metrology: A Tree-Based Approach. In 23rd IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2018, Torino, Italy, September 4-7, 2018. pages 845-852, IEEE, 2018. [doi]

Authors

Yang Liu

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Xin Li

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